Photo Mask Substrate Inspection Device 'Torin G8/G10'
The measurement range can be up to a maximum of 2100×2000mm! The speed and positioning of the servo motor are controlled by a computer.
The "Torin G8/G10" is a photomask substrate inspection device that measures the thickness and flatness of substrates with high precision using two opposing semiconductor lasers, while standing vertically without applying stress to the photomask substrate. The measurement range can go up to a maximum of 2100×2000mm. The main base, columns, and sliding parts are all made of Indian black granite, and air bearings are used for the measurement axes, which are critical for accurate measurements. 【Features】 ■ Two semiconductor lasers measure with high precision ■ Air bearings are used for the measurement axes, which are crucial for measurement ■ One optical probe is used exclusively for mirror-finish substrates to obtain absolute thickness and both flatness *For more details, please refer to the PDF document or feel free to contact us.
- Company：土井精密ラップ
- Price：Other
